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Effect of chamber pressure on the growth of nanoparticles copper- carbon composite films prepared by simultaneity use of RF-PECVD and RF-sputtering deposition technique

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Effect of chamber pressure on the growth of nanoparticles copper- carbon composite films prepared by simultaneity use of RF-PECVD and RF-sputtering deposition technique (سومين کنفرانس ملی خلا -تهران)

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